ci801kit
ci801kit
兩相混合式步進電機步距角一般為 1.8°、0.9°，五相混合式步進電機步距角一般為0.72 °、0.36°。也有一些的步進電機通過細分後步距角更小。如三洋公司（SANYO DENKI）生產的二相混合式步進電機其步距角可通過撥碼開關設置為1.8°、0.9°、0.72°、0.36°、0.18°、0.09°、0.072°、0.036°，兼容了兩相和五相混合式步進電機的步距角。
交流伺服電機的控制精度由電機軸後端的旋轉編碼器保證。以三洋全數字式交流伺服電機為例，對於帶標準2000線編碼器的電機而言，由於驅動器內部採用了四倍頻技術，其脈衝當量為360°/8000=0.045°。對於帶17位編碼器的電機而言，驅動器每接收131072個脈衝電機轉一圈，即其脈衝當量為360°/131072=0.0027466°，是步距角為1.8°的步進電機的脈衝當量的1/655。
步進電機在低速時易出現低頻振動現象。振動頻率與負載情況和驅動器性能有關，一般認為振動頻率為電機空載起跳頻率的一半。這種由步進電機的工作原理所決定的低頻振動現象對於機器的正常運轉非常不利。當步進電機工作在低速時，一般應採用阻尼技術來克服低頻振動現象，比如在電機上加阻尼器，或驅動器上採用細分技術等。
交流伺服電機運轉非常平穩，即使在低速時也不會出現振動現象。交流伺服係統具有共振抑制功能，可涵蓋機械的剛性不足，並且係統內部具有頻率解析機能（FFT），可檢測出機械的共振點，便於係統調整。
KLA-Tencor AMS Assembly 720-4800036-002 Used
KLA-Tencor X-Scanner Assembly 760-032324-00
KLA Tencor PSF driver 0031663-000
KLA-Tencor RS100 Equipe Robot End Effector working
KLA-Tencor 64060 Distribution Module working
KLA-Tencor 301 I-Line RF Bench 740-323100-002 untested
KLA-Tencor SLX Telescope Turret 740-333024-001 untested
KLA-Tencor Quantox Distribution Module 64060 working
KLA-Tencor Optics RF Bench Assy. 740-058089-00 untested
KLA-Tencor 0092173-001 Hamamtsu L9519-01 D2 HB Lamp
KLA-Tencor AIT Laser Servo Detector Assy. 0099586-000
KLA-Tencor AIT 2 Tropel Lens Assy. 142851 working
KLA-Tencor 710-680279-00 Optics Interface Board
KLA-Tencor AIT1 Tropel 11.25X Anamorphic Telescope
KLA-Tencor AIT2 UI Splitter Board 547247 Working
KLA-Tencor 285293 386065 AIT2 GPIO Board Working
KLA-Tencor AIT2 XP Datapackage Board 0048805-002
KLA-Tencor AIT2 4-Channel PWM Motor Drive Board 188859
KLA-Tencor AIT1 Ultrapointe Page Scanner Controller PCB
KLA-Tencor SLX Relay/M5 Assembly 760-333019-001 Used
KLA-Tencor 5300 AMS Assy 720-480036-002 Used, Untested
KLA-Tencor 3XX-1 Image Rotator 760-321260-000
KLA-Tencor SP1 TBI Ellipsoid Collector 393541
KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002
KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used
KLA-Tencor Programmable Assembly 20009243A
KLA-Tencor F5 Flipper Actuator 52-0837
KLA-Tencor M1 3XX-I Active Mirror 760-321700-001
KLA Tencor 250864
KLA Tencor Extender Card 710-711345-00
KLA TENCOR AUTOFOCUS COLLIMATING LENS 2135/ 2132 LOADER
KLA-Tencor CRS1010 0031469-000 CRS SYSTEMS COMPUTER
KLA Tencor PZT controller 710-404582-00
Daihen KLA-Tencor HRP-340 Auto Tune Box CMC-10
KLA-Tencor 3XX-I Refl. Light Detect.760-321399-000 Used
KLA-Tencor SLX UCO, COL Assembly 760-333305-000 Used
KLA-Tencor Comet AMS Low Mag 0104920-003 Refurbished
KLA-Tencor 3XX-Blue Cas Replacement 780-372161-000 Used
KLA-Tencor Housekeeping Control 0075164-002 working
KLA-Tencor CRS1010 SDP Frame Grabber PCB 000483
KLA-Tencor HRP-340 Techsol Filter Unit 009-99FFU
KLA-Tencor SLX Reflected Light Assy 760-333022-000 Used
KLA-Tencor 5200 Dual Aperture Assy 720-470028-00 Used
KLA-Tencor Mark II Right Top Plate 740-680567-000
KLA-Tencor SM300 Monochromator 58-0834
KLA-Tencor Nikon Box Door Opener 750-059211-001
KLA-Tencor Dalton TDI Inspection Camera 750-061019-00
KLA-Tencor MGF2 Analyzer Assembly 0045755-000
KLA TENCOR 220V 37A BLOWER SINGLE PHASE 60HZ
KLA Tencor assy M1/M2 SERVO SP1 UV
KLA-Tencor 760-031790-00 Detector unit ,
KLA-TENCOR SFLEX2 MOTHER BOARD ASSY W/DAUGHTER BOARD ,
KLA Tencor 2131 2132 2552 Defect Wafer Inspection Sys
KLA-Tencor Surfscan 6200 Wafer Surface Analysis System
KLA TENCOR 2131 WAFER DEFECT INSPECTION SYSTEM
Wyko Veeco NT2000 Optical Profiler Zygo KLA Tencor
KLA-Tencor Prometrix FT-750 Film Thickness Measurement
KLA-Tencor Prometrix FT-750 Film Thickness Measurement
KLA-Tencor CRS 3000 300MM COMPLETE SYSTEM
KLA Tencor Ultrapointe Laser Imaging System LIS-1010
KLA Tencor Surfscan 4500
KLA-Tencor Prometrix FT-600 Film Thickness Measurement
Automated in-line film thickness mapping system w/ C2C
KLA-Tencor AIT 2 Upper Opto-Mech NNC 0024755-001
KLA-Tencor AIT 2 Rear Collector Assy. 0032129-000
KLA-Tencor AIT 2 Front Collector Assy. 0032131-001
KLA-Tencor AIT2 AIT3 Rear Collector Assy. 562556
KLA-Tencor ES4G Calibration Wafer Set
KLA-Tencor AIT 2 Measurement Head 0021726-001 working
KLA Tencor 2135 CMP Wafer Inspection Robot Loader Assy
KLA-Tencor AIT 2 Optics Module 0099610-000 untested
KLA-Tencor 2139 Software v5.3.49 Standard 0027325-000
KLA TENCOR DIGITAL DEFLECTION GENERATOR 701-603180-003
KLA - Tencor KIT , 190 ANALYZER FRU II 0145772-000
PRI KLA-Tencor Robot Track TRA035-LPS working
KLA-Tencor AIT1 JDS Uniphase Laser 2213-75TSLKTB
KLA-Tencor AIT 2 3 Front Collector Assy. 562610
KLA-Tencor AIT 1 JDS Uniphase Laser 2214-20SLUP
KLA-Tencor Alpha-Step 100 Profiler and Printer
KLA-Tencor Quantox 64000 Cooling Module working
KLA-Tencor Quantox 64000 Cooling Module working
KLA-Tencor AIT2 CPM Power Assembly 0218541-000
KLA-Tencor 2139 Sony DXC-9000 Camera 740-772299-000 Kit
KLA-Tencor 2135 Vertical Illuminator 760-663761-001
KLA-Tencor 2135 to 2138 Upgrade Kit 780-696341-000
KLA-Tencor 2138 Motorized 200mm Retrofit 780-666008-000
KLA - Tencor eS35 IA Board PN: 0134014-002
KLA-TENCOR 0111816-000 MCP10-DPRC CARD MERCURY COMPUTER
KLA-Tencor NEAT CRS1010 200mm Wafer Stage Controller
KLA-Tencor SLX MAC Box Assy. 770-336660-001 untested
KLA-Tencor AIT1 Leica Microscope Turret Assembly
KLA-Tencor AIT Lens Module 0034691-000 working
KLA-Tencor AIT2 Timing Generator Board 0053946-000 AA
KLA-Tencor AIT2 Wafer APS3.1 Board 0016302-000 AB
KLA-Tencor AIT1 Robot Distr. Assy. PCB 530352 Working
KLA-Tencor AIT1 Olympus Microscope Assembly Working
KLA Tencor Camera Timer 710-714647-00
KLA TENCOR IMAGE DATA STORAGE SYSTEM 710-612545-004/AA
KLA/Tencor/Tokyo Electron VIP Card Board TEL
KLA TENCOR SERVO AMPLIFIER 0061657-001
Aerotech KLA-Tencor Aerotech DR 500 Controller 510432
Aerotech KLA-Tencor AIT 2 DR 500 Controller 510432
KLA-Tencor AIT 2 Timing Generator Board 0053946-000
KLA-Tencor AIT 2 MMD Analog Board 565040 working
KLA-Tencor AIT 2 MMD Analog Board 565040 working
KLA-Tencor SLX RF Bench Assy. 740-336864-001 working
KLA-Tencor 301 I-Line RF Bench 740-323100-002 working
KLA-Tencor Quantox Light Board Module 64040 working
KLA-Tencor AIT 2 AOD GPIO Assy. 0017499-000 working
KLA-Tencor TMC STACIS 2000 Active Vibration Control
KLA-Tencor AIT2 Heat Exhaust Blower 570-0443
KLA-Tencor Cobra Shipping Filter Assy 0107339-000 Used