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ASM 390
ASM 392
ASM 380 ¤w°±²£
ÀË´ú®ðÅé
4He, 3He, H2
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¯uªÅ¼Ò¦¡: 1X10-12 mbar l/s
§lºj¼Ò¦¡: 1X10-8 mbar l/s
¹ï®ó®ðªº©â³t
10 l/s
25 l/s, ¤º¸m2»O¤À¤l¬¦
7 l/s
«e¯Å¬¦©â³t
35 m3/h
¶i®ð¤f¤jÀ£¤O
20 mbar
20 mbar
15 mbar
µL®Õ·Çªº±Ò°Ê®É¶¡(20¢XC)
2 min
2 min
< 4.5 min
¶i®ð¤f
DN 40 ISO-KF
ÅTÀ³®É¶¡
< 1 s
Interface, ¿ï°t
RS-232, I/O, Ethernet
¾¸µ
55 dB (A)
55 dB (A)
53 dB (A)
Ǧq
125 kg
130 kg
110 kg
¤Ø¤o(LxWxH)
1072 x 455 x 1025 mm
1072 x 455 x 1025 mm
1065 X 455 X 1025 mm
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