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®ðÅé¤ÀªR»ö HiQuad?
§BªF¤½¥q´¶µo Pfeiffer ®ðÅé¤ÀªR»ö HiQuad?, ¥i¹ê²{°ª¹F 125£gs / amu ªº´ú¶q³t«×, ¨Ï¥Î Quadera? ³n¥ó, ¾Þ§@²³æ. ½èÃФÀªR»ö¼Ò¶ô¤Æ³]­p¤è«K¶°¦¨, ®Ú¾Ú¹ê»Ú»Ý­n¥i¥H¦Û¥Ñ¿ï¾Ü½è¶q½d³ò, ±ìª½®|, Â÷¤l·½, ±´´ú¾¹©M¬É­±.

Pfeiffer ½èÃФÀªR»ö HiQuad?Àu¶Õ
1. ¼Ò¶ô¤Æ³]­pÆF¬¡
2. ¨Ï¥Î Quadera? ³n¥ó, ¾Þ§@²³æ
3. ªº´ú¶q³t«×, °ª¹F 125£gs/ amu
4. ªºÆF±Ó«×¥B°ÊºA½d³ò¼e
5. ¤º¸mªº¤¬ÁpºôÂsÄý¾¹©M OPC ªA°È¾¹¥Î©ó»P°ò©ó PC ªºµ{§Ç¶i¦æ³q«H

½èÃФÀªR»ö HiQuad? §Þ³N³W®æ

½è¶q¼Æ amu

1-128

1-300

1-512 *3)

§CÀË´ú­­ mbar

5X10-16

2X10-15

1X10-15

Ar ÆF±Ó«×,§C *1) A/mbar

1X10-3

2X10-4

5X10-4

¤j¾Þ§@À£¤O mbar

ªk©Ô²Ä

1X10-4

1X10-4

1X10-4

SEM

1X10-5

1X10-5

1X10-5

¤ÀÀ£¤ñ SEM ppb

< 0.3

< 1

< 0.5

¤ÀªR»ö

QMA 410

QMA 430

QMA 400

±ì«Y²Î, §÷®Æ / ª½®| mm

Mo / 16

¤£ù׿û / 8

Mo / 8

®gÀWµo¥Í¾¹ (RF)

QMH 400-1

QMH 400-5

QMH 400-5

ÀR¹q­p«e¸m©ñ¤j¾¹

EP 422

EP 422

EP 422

¤u§@·Å«× / ¤ÀªR»ö¢XC

150

150

150

¯M¯N·Å«× / ¤ÀªR»ö *2) ¢XC

400

400

400

³s±µªkÄõ

DN 100 CF-F

DN 63 CF-F

DN 63 CF-F

*1) °¾Âà³æ¤¸¤¤ªºªk©Ô²Ä,¼Ð·Ç¤À¿ë²v,±aºÏÅKªº¥æ¤e§ôÂ÷¤l·½,µo®g 1 mA
*2) ±aºÏÅK, °ª 300¢XC
*3) ¤K¤p®É¤ºÃ­©w©Ê < 0.1¢H, ¦³§U©ó¹ï¬Û¾F½è¶q¼Æ 40Ar / 41

Pfeiffer ½èÃФÀªR»ö HiQuad?À³¥Î


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