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PfeifferºÊ´ú½èÃÐ SPM 220 §Þ³N°Ñ¼Æ¡G

SPM «Y²Î±±¨î

BRU 220

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115-230 V

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MVP 020-3

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QME 220

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QMA 220

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C-SEM/Faraday

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6 mm 

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100 mm 

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< 100 ppb

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< 100 ppb

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< 100 ppb

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< 3000 ppb

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< 500 ppb or < 6000 ppb

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±a¦³ TC 110 RS ªº HiPace 80

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1-100 amu or 1-200 amu

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1 hPa or 10 hPa or 8hPa

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DN 40 CF-F

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13 kg 

 

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